Metrology/Inspection: Wafer Inspection

Lasers systems are becoming the instrument of choice to detect defects within wafers in water-free environments

About Metrology/Inspection: Wafer Inspection

In a water-free environment, where contaminants cause wastage, lasers systems are becoming the instrument of choice to detect defects within wafers. As the technology becomes used more in an in-line scanning production line, the laser system needs to be adaptable for these integration challenges. Novanta understands the demands within this application and delivers equipment tailored to satisfy said demands.

 

  • Reduce false positives and offer higher throughput with 24/7 product lifetime and power level retention.
  • Reproducible performance laser to laser with remote servicing to prevent and minimize downtime.
  • Enable fast scanning in-line and precise results due to high wall plug efficiency, in a compact platform for easy integration.
  • Comply to clean operating environments and sensitive to defects with air-cooled solutions.
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Application
Metrology/Inspection

Precision and accuracy for improved throughput and 24/7 reliability