Metrology/Inspection: Wafer Inspection

Lasers systems are becoming the instrument of choice to detect defects within wafers in water-free environments

About Metrology/Inspection: Wafer Inspection

In a water-free environment, where contaminants cause wastage, lasers systems are becoming the instrument of choice to detect defects within wafers. As the technology becomes used more in an in-line scanning production line, the laser system needs to be adaptable for these integration challenges. Novanta understands the demands within this application and delivers equipment tailored to satisfy said demands.

Reduce false positives and offer higher throughput with 24/7 product lifetime and power level retention.
Reproducible performance laser to laser with remote servicing to prevent and minimize downtime.
Enable fast scanning in-line and precise results due to high wall plug efficiency, in a compact platform for easy integration.
Comply to clean operating environments and sensitive to defects with air-cooled solutions.